Dirk Hambach

Title: Dirk Hambach: Innovator in Charged Particle Beam Technology

Introduction

Dirk Hambach is a notable inventor based in Munich, Germany. He has made significant contributions to the field of charged particle beam technology, holding two patents that showcase his innovative approach to examining and structuring specimens.

Latest Patents

One of his latest patents is a "Charged particle beam device with retarding field analyzer." This invention provides a charged particle beam device designed to inspect or structure a specimen using a primary charged particle beam that propagates along an optical axis. The device includes a beam tube element with a tube voltage and a retarding field analyzer positioned near the beam tube element to detect secondary charged particles generated by the primary beam on the specimen. The retarding field analyzer features an entrance grid electrode at a second voltage, at least one filter grid electrode at a first voltage, and a charged particle detector. Additionally, it incorporates further electrode elements that reduce stray field regions, significantly improving the energy resolution of the analyzer, especially when the beam tube element is part of a high voltage beam tube.

Another significant patent is a "Method for examining structures on a semiconductor substrate." This method involves imaging structures on a semiconductor substrate using X-radiation in an X-ray microscope. The wavelength of the X-radiation is adjusted based on the thickness of the semiconductor substrate to ensure suitable transmission and high-contrast imaging. This allows for continuous observation of structures with short exposure times and high resolution, even while they are operational.

Career Highlights

Dirk Hambach has worked with several prominent companies in the field, including Leica Microsystems Lithography GmbH and ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH. His experience in these organizations has contributed to his expertise and innovative capabilities in charged particle beam technology.

Collaborations

Dirk has collaborated with notable professionals in his field, including Gerd Schneider and Bastian Niemann. These collaborations have likely enriched his work and led to advancements in his inventions.

Conclusion

Dirk Hambach is a distinguished inventor whose work in charged particle beam technology has led to significant advancements in the field. His patents reflect a deep understanding of the complexities involved in examining and structuring specimens, showcasing his innovative spirit and dedication to technological progress.