Dimitry Kouzminov

Title: Innovations of Dimitry Kouzminov

Introduction

Dimitry Kouzminov is an accomplished inventor based in Beverly, MA (US). He has made significant contributions to the field of metrology through his innovative patent. His work focuses on enhancing the efficiency and effectiveness of secondary ion mass spectrometry (SIMS) processes.

Latest Patents

Dimitry holds a patent for a "Multiple plasma ion source for inline secondary ion mass spectrometry." This invention leverages premixed gas mixtures to perform a metrology process on a substrate using an inline SIMS process. The method involves injecting a premixed gas mixture of two or more gases into a plasma chamber, which is configured to produce sputtering ions for the inline SIMS process. The gases produce non-metallic ion species that are compatible with downstream substrate fabrication processes, allowing further fabrication to be performed on the substrate after the inline SIMS process has completed. The sputtering ions are ejected from the plasma chamber into a magnetic field, where the intensity of the magnetic field is altered to select a single species of ions. These ions are then directed towards the substrate's surface, and the secondary ions sputtered from the surface are detected and analyzed.

Career Highlights

Dimitry is currently employed at Applied Materials, Inc., where he continues to innovate and contribute to advancements in technology. His work has been instrumental in improving metrology processes, which are crucial for various applications in semiconductor manufacturing and materials science.

Collaborations

Dimitry has collaborated with notable colleagues, including Ming Hong Yang and Arun Ramaswamy Srivatsa. These collaborations have fostered a productive environment for innovation and have led to significant advancements in their respective fields.

Conclusion

Dimitry Kouzminov's contributions to the field of metrology through his innovative patent demonstrate his expertise and commitment to advancing technology. His work at Applied Materials, Inc. and collaborations with esteemed colleagues further highlight his impact on the industry.