This inventor holds 1 USPTO granted patent. Top assignee: Sandia Corporation. Active years: 2000.
Company Filing History:
Years Active: 2000
Title: The Innovative Contributions of Diane E Peebles
Introduction
Diane E Peebles is a notable inventor based in Albuquerque, NM (US). She has made significant contributions to the field of deposition technology, particularly in methods that enhance the efficiency and effectiveness of deposition chambers. Her work is characterized by a focus on reducing particle generation during the coating process.
Latest Patents
Diane holds a patent for a method titled "Supplemental heating of deposition tooling shields." This innovative approach addresses the challenge of temperature variations exceeding 100 degrees Celsius within deposition chambers. The patent outlines a method to maintain lower temperature variations on internal surfaces, thereby minimizing thermal expansion stresses between the coating and the surfaces to under 500 MPa. Specifically, for titanium nitride deposited on stainless steel, it is crucial to keep temperature variations below approximately 70 degrees Celsius in a chamber that may reach over 350 degrees Celsius during processing. The invention includes a supplemental heater mounted behind the upper shield, which is controlled by a temperature-sensitive element that provides feedback control based on the upper shield's temperature.
Career Highlights
Diane is associated with Sandia Corporation, where she has been able to apply her expertise in deposition technology. Her innovative work has contributed to advancements in the field, showcasing her commitment to improving industrial processes.
Collaborations
Diane has collaborated with notable colleagues, including James A Ohlhausen and John A Hunter. These partnerships have likely enriched her research and development efforts, leading to more robust solutions in her area of expertise.
Conclusion
Diane E Peebles exemplifies the spirit of innovation through her patent and contributions to deposition technology. Her work not only addresses critical challenges in the field but also sets a foundation for future advancements.
