DeogJa Koo

Title: DeogJa Koo: Innovator in Plasma Technology

Introduction

DeogJa Koo is a prominent inventor based in Yongin-si, South Korea. He has made significant contributions to the field of semiconductor device fabrication. His innovative work has led to the development of a unique plasma apparatus that enhances the efficiency of semiconductor manufacturing processes.

Latest Patents

DeogJa Koo holds a patent for a plasma apparatus and method of fabricating semiconductor devices using the same. This plasma apparatus features a process chamber with an inner space, a chuck for substrate loading, a gas supply unit for process gas, a plasma generating unit, and a direct current (DC) power generator. The design includes a DC pulse signal that consists of a negative pulse duration, a positive pulse duration, and a pulse-off duration. This innovative approach allows for improved control over the plasma generation process, which is crucial for semiconductor fabrication.

Career Highlights

DeogJa Koo is currently employed at Samsung Electronics Co., Ltd., a leading global technology company. His work at Samsung has allowed him to be at the forefront of advancements in semiconductor technology. With a focus on innovation, he continues to contribute to the development of cutting-edge solutions in the industry.

Collaborations

DeogJa Koo has collaborated with notable colleagues, including Moojin Kim and Bongseong Kim. These partnerships have fostered a creative environment that encourages the exchange of ideas and expertise in the field of plasma technology.

Conclusion

DeogJa Koo's contributions to plasma technology and semiconductor fabrication are noteworthy. His innovative patent and work at Samsung Electronics Co., Ltd. highlight his role as a key player in advancing technology in this critical industry.