Dengyong Yu

Title: Innovations of Dengyong Yu in Temperature Detection Technology

Introduction

Dengyong Yu is a notable inventor based in Shanghai, China, recognized for his contributions to the field of semiconductor technology. He holds two patents that focus on improving the efficiency and accuracy of temperature detection in thermal chambers. His work is instrumental in advancing the capabilities of silicon wafer processing.

Latest Patents

Dengyong Yu's latest patents include a method for detecting the temperature of a thermal chamber. This innovative method involves conducting a thermal treatment at a predicted temperature to a selected silicon wafer within a thermal chamber. The process includes obtaining a haze value corresponding to the predicted temperature and establishing a linear relationship between temperature and haze. After polishing and washing the silicon wafer, a second thermal treatment is conducted, allowing for the calculation of the actual temperature difference of the thermal chamber based on the haze difference. This method significantly increases the efficiency and accuracy of temperature detection, reduces fluctuations caused by silicon wafer thickness and resistivity, enhances the utilization of silicon wafers, and ultimately lowers costs.

Career Highlights

Dengyong Yu is currently employed at Zing Semiconductor Corporation, where he continues to innovate in the semiconductor industry. His work has had a profound impact on the development of temperature detection technologies, making him a valuable asset to his company and the field at large.

Collaborations

Dengyong Yu collaborates with talented individuals such as Gongbai Cao and Liying Liu, contributing to a dynamic work environment that fosters innovation and creativity.

Conclusion

Dengyong Yu's contributions to temperature detection technology exemplify the importance of innovation in the semiconductor industry. His patents not only enhance operational efficiency but also pave the way for future advancements in the field.