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Title: Deirdre Olynick: Innovator in Silicon Micromachining
Introduction
Deirdre Olynick is a prominent inventor based in El Cerrito, California. She has made significant contributions to the field of silicon micromachining, holding a total of 3 patents. Her innovative work focuses on advanced etching techniques that enhance the precision and quality of silicon features.
Latest Patents
Olynick's latest patents include groundbreaking methods in etching and lithographic dry development. One of her notable inventions is the "Etching radical controlled gas chopped deep reactive ion etching." This method allows for high aspect ratio reactive ion etching with gas chopping, producing smooth, scallop-free sidewall surfaces. By controlling the flow of etching and deposition gas precursors, she achieves a high level of anisotropy and minimizes sidewall ripples. Her results demonstrate the capability to create silicon features with an aspect ratio of 20:1 for 10 nm features, which is crucial for nano-applications in the sub-50 nm regime.
Another significant patent is related to "Lithographic dry development using optical absorption." This novel approach involves exposing a photo resist layer to a visible light source, which removes the resist in the exposed areas. The compounds used in this process undergo a chemical change, becoming volatile and allowing for the removal of the resist surface. This innovative technique has the potential to streamline the development process in photolithography.
Career Highlights
Throughout her career, Olynick has worked with esteemed institutions such as the University of California and Technische Universität Ilmenau. Her research has significantly advanced the field of micromachining, making her a respected figure among her peers.
Collaborations
Olynick has collaborated with notable individuals in her field, including Ivo Rangelow and Weilun Chao. These partnerships have contributed to her innovative research and development efforts.
Conclusion
Deirdre Olynick's contributions to silicon micromachining and her innovative patents highlight her role as a leading inventor in her field. Her work continues to influence advancements in technology and nanofabrication.