Davood Khalili

Title: Innovations of Davood Khalili

Introduction

Davood Khalili is a notable inventor based in Santa Clara, California. He has made significant contributions to the fields of semiconductor processing and respiratory gas analysis. With a total of two patents to his name, Khalili's work showcases his expertise and innovative spirit.

Latest Patents

Khalili's latest patents include a method and apparatus for reducing particle contamination on wafer backside during the chemical vapor deposition (CVD) process. This invention addresses the issue of backside particle contamination of semiconductor wafers by optimizing various process parameters. The approach involves depositing a high-quality oxide seasoning layer to enhance adhesion and trapping of contaminants. Additionally, the invention incorporates wafer pre-heating to minimize thermal stress during contact with the heater. It also reduces the duration of gas stabilization flow prior to the CVD reaction, preventing side products from affecting the wafer backside. Furthermore, the redesign of the wafer heater aims to minimize physical contact with the wafer, enhancing the overall process efficiency.

Another significant patent by Khalili is an improved respiratory gas analyzer. This apparatus measures the concentration of carbon dioxide in respiratory gases using a non-dispersive gas analyzer that is universally compatible with any host system. The design includes a housing that supports a sample cell and an infrared radiation source encased in shock-absorbing material. The analyzer features means for directing radiation into a collimated beam path and includes two heating servos for regulating temperatures, ensuring accurate measurements.

Career Highlights

Throughout his career, Khalili has worked with prominent companies such as Applied Materials, Inc. and Andros Incorporated. His experience in these organizations has contributed to his development as an inventor and innovator in his field.

Collaborations

Khalili has collaborated with notable coworkers, including Bok Hoen Kim and Mario Dave Silvetti. These partnerships have likely enriched his work and contributed to his innovative projects.

Conclusion

Davood Khalili's contributions to the fields of semiconductor processing and respiratory gas analysis highlight his innovative capabilities. His patents reflect a commitment to improving technology and enhancing efficiency in critical processes.