David R Burgin

Title: David R. Burgin – Innovator in Ion Implantation Technology

Introduction

David R. Burgin is a renowned inventor based in Grenoble, France, recognized for his significant contributions to the field of ion implantation technology. With a total of four patents to his name, Burgin has demonstrated remarkable expertise in enhancing the efficiency and longevity of ion implantation equipment.

Latest Patents

Burgin's latest innovations include an ion implantation apparatus designed to increase source lifetime. This cutting-edge equipment modification introduces filament reflectors to the filament inside an arc chamber. It also eliminates the need for electrical insulators for the filament outside of the arc chamber while providing a shielding mechanism. These changes effectively reduce the formation of a conductive layer on the insulators, significantly extending the equipment's lifetime and minimizing downtime. Moreover, the apparatus features an interchangeable liner for the arc chamber, which raises the wall temperature and, consequently, the electron temperature, thereby boosting efficiency.

Furthermore, Burgin's design incorporates tungsten parts within the arc chamber, either by constructing the chamber from tungsten or by adding removable tungsten liners. This innovation effectively reduces contamination of the ion beam. The serviceability of the arc chamber is also improved with a unitary clamp that securely grips both the filament and filament reflectors, which can also be constructed from tungsten for added durability.

Career Highlights

David R. Burgin has made significant strides at Applied Materials, Inc., a leading provider of equipment and services for the semiconductor and display manufacturing industries. His work has not only advanced the field of ion implantation technology but has also positioned him as a key player in enhancing manufacturing processes.

Collaborations

Throughout his career, Burgin has collaborated with esteemed professionals such as Nicholas Bright and Paul A. Burfield. These partnerships have facilitated knowledge exchange and have fostered advancements in their respective areas of expertise, contributing to the overall success of innovative projects.

Conclusion

In conclusion, David R. Burgin stands out as a pioneering inventor in ion implantation technology. His recent patents reflect his commitment to innovation and improving equipment reliability. As the industry continues to evolve, inventors like Burgin play an essential role in shaping the future of technology and manufacturing practices.