Location History:
- Cuppertino, CA (US) (2000)
- Cupertino, CA (US) (2001)
Company Filing History:
Years Active: 2000-2001
Title: Innovations of David Nin-Kou Wang in Semiconductor Processing
Introduction
David Nin-Kou Wang is a prominent inventor based in Cupertino, CA (US). He has made significant contributions to the field of semiconductor processing, holding 2 patents that showcase his innovative approaches. His work primarily focuses on advanced reactor designs and etching processes that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
Wang's latest patents include a Thermal CVD/PECVD reactor designed for thermal chemical vapor deposition of silicon dioxide. This high-pressure, high-throughput reactor is capable of performing various processes such as thermal CVD, plasma-enhanced CVD, and plasma-assisted etchback. The reactor features interdigitated arrays of susceptor and wafer support fingers that facilitate precise wafer handling and positioning. Additionally, it incorporates a combined RF/gas feed-through device to prevent gas leaks while applying RF energy. The reactor's design ensures uniform gas flow and temperature control, which are critical for maintaining clean processing conditions.
Another notable patent involves a bromine and iodine etch process for silicon and silicides. This innovative method utilizes iodinate or brominate gas chemistry to etch narrow deep trenches with high aspect ratios, achieving excellent profile control without undesirable side effects such as black silicon formation.
Career Highlights
David Nin-Kou Wang is currently associated with Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work has significantly impacted the development of advanced semiconductor manufacturing technologies, making him a key figure in the field.
Collaborations
Wang has collaborated with notable professionals in the industry, including Dan Maydan and John M White. These collaborations have further enriched his contributions to semiconductor technology.
Conclusion
David Nin-Kou Wang's innovative patents and career achievements highlight his vital role in advancing semiconductor processing technologies. His work continues to influence the industry, paving the way for future innovations.