Company Filing History:
Years Active: 1986
Title: David L. Allen: Innovator in Semiconductor Alignment Technology
Introduction
David L. Allen is a notable inventor based in Cupertino, California. He has made significant contributions to the field of semiconductor technology, particularly in the area of alignment systems. His innovative work has led to the development of a patented system that enhances the precision of semiconductor substrate positioning.
Latest Patents
David L. Allen holds a patent for an "Auto-focus alignment and measurement system and method." This invention provides an auto-focusing alignment and measurement system designed for accurately positioning a semiconductor substrate in relation to an integrated circuit mask. The system features a moveable convergent lens that works in conjunction with another pair of convergent lenses to alternately focus images of the mask and substrate onto a photodiode array. The photodiode array acts as a focus detector, and together with the associated signal processing circuitry, it generates a feedback signal that controls the displacement of the moveable lens. This ensures that the separation between the mask and substrate is equalized with an accuracy that surpasses the depth of field of the optics. Additionally, the system includes an illumination source and viewing optics that provide a magnified view of the images, facilitating the alignment process prior to photolithographic printing.
Career Highlights
David L. Allen is currently employed at Eaton Corporation, where he continues to apply his expertise in semiconductor technologies. His work at Eaton has allowed him to further develop and refine his innovative ideas, contributing to advancements in the industry.
Collaborations
One of his notable collaborators is Tor G. Larsen, with whom he has worked on various projects related to semiconductor technology.
Conclusion
David L. Allen's contributions to the field of semiconductor alignment technology are significant and impactful. His patented innovations demonstrate his commitment to enhancing precision in semiconductor manufacturing processes.