David J Harvey

Title: Innovations by David J Harvey

Introduction

David J Harvey is an accomplished inventor based in Campbell, CA (US). He holds 2 patents that showcase his expertise in optical inspection systems. His work has significantly contributed to advancements in the field of substrate inspection.

Latest Patents

One of his latest patents is for an "Automatic high speed optical inspection system." This innovative system utilizes at least one TDI sensor to image substrate portions of interest, ensuring those portions are illuminated with substantially uniform illumination. The system compares a substrate to prestored expected characteristic features, enhancing the accuracy of inspections. Another configuration inspects first and second patterns on a substrate's surface by comparing them against each other, noting agreements and discrepancies. This method is particularly useful for die-to-die inspections. A variation of this configuration employs two TDI sensors to simultaneously image the patterns, streamlining the inspection process.

His second patent, titled "Method and apparatus for optical inspection of substrates," involves a comprehensive inspection apparatus and methods, along with illumination apparatus. This system includes memory for storing desired features of the substrate's surface and a focused illuminator for uniform illumination. The sensor images the illuminated region, while a comparator analyzes the imaged region against the stored features. The design incorporates elliptically cylindrical reflectors and linear light sources to achieve precise illumination.

Career Highlights

David has worked with notable companies, including Kla Instruments Corporation. His experience in these organizations has allowed him to refine his skills and contribute to significant technological advancements.

Collaborations

Throughout his career, David has collaborated with talented individuals such as Curt H Chadwick and Robert R Sholes. These partnerships have fostered innovation and enhanced the development of his patented technologies.

Conclusion

David J Harvey's contributions to optical inspection technology through his patents reflect his dedication to innovation. His work continues to influence the industry and improve inspection methodologies.