David E Smith

Title: David E. Smith: Innovator in Electron Beam Inspection Technology

Introduction

David E. Smith is a notable inventor based in San Mateo, California. He has made significant contributions to the field of particle scanning systems and automatic inspection technologies. His innovative work has led to the development of a unique electron beam inspection system.

Latest Patents

David E. Smith holds a patent for an "Electron Beam Inspection System and Method." This invention encompasses various embodiments of a method and apparatus designed for a particle scanning system. The system directs a particle beam at the surface of a substrate for scanning purposes. It includes a selection of detectors that can detect secondary particles, back-scattered particles, and transmitted particles from the substrate. The substrate is mounted on an x-y stage, allowing it to have at least one degree of freedom during scanning. Additionally, the substrate is subjected to an electric field to accelerate secondary particles. The system is equipped with capabilities to accurately measure the substrate's position concerning the charged particle beam. An optical alignment means is also included for initial alignment beneath the particle beam. Furthermore, a vacuum means is utilized for evacuating and repressurizing the chamber containing the substrate, enhancing the efficiency of the inspection process.

Career Highlights

David E. Smith is associated with Kla Instruments Corporation, where he has been instrumental in advancing inspection technologies. His work has significantly impacted the efficiency and accuracy of particle scanning systems.

Collaborations

David has collaborated with notable colleagues, including Dan Meisburger and Alan D. Brodie, contributing to the development of innovative technologies in his field.

Conclusion

David E. Smith's contributions to electron beam inspection technology exemplify his innovative spirit and dedication to advancing scientific methods. His patent and work at Kla Instruments Corporation highlight his role as a key figure in the field of particle scanning systems.