Company Filing History:
6 out of 3,777 
1 out of 832,843 Years Active: 2002-2014
Title: The Innovative Contributions of David Benzing
Introduction
David Benzing is a notable inventor based in San Jose, CA, with a remarkable portfolio of 7 patents. His work primarily focuses on advancements in plasma processing technology, which plays a crucial role in semiconductor manufacturing.
Latest Patents
One of Benzing's latest patents is titled "Electrode for plasma processes and method for manufacture and use thereof." This invention describes a silicon electrode designed for a plasma reaction chamber, enabling the processing of semiconductor substrates, such as single wafers. The electrode boasts low electrical resistivity, measuring less than 1 ohm-cm, and can be constructed from zero defect single crystal silicon or silicon carbide. The design includes a showerhead electrode that can be bonded or clamped to a temperature-controlled support, featuring gas outlets with diameters ranging from 0.020 to 0.030 inches.
Another significant patent is the "Hollow anode plasma reactor and method." This plasma processing apparatus consists of a plasma chamber, a first electrode, a second electrode, and a plasma containment device. The containment device is equipped with multiple slots and is electrically connected to the first electrode. It is designed to confine plasma within an inter-electrode volume while allowing maximum process gas flow, ensuring efficient plasma generation.
Career Highlights
Throughout his career, David Benzing has made substantial contributions to the field of plasma processing. He has worked with prominent companies, including Lam Research Corporation, where he has applied his expertise to develop innovative solutions for semiconductor manufacturing.
Collaborations
Benzing has collaborated with notable professionals in the industry, including Albert R Ellingboe and Taejoon Han. These collaborations have further enhanced his work and contributed to the advancement of plasma processing technologies.
Conclusion
David Benzing's innovative patents and contributions to plasma processing technology have significantly impacted the semiconductor industry. His work continues to pave the way for advancements in manufacturing processes, showcasing the importance of innovation in technology.