Company Filing History:
Years Active: 1992
Title: David A. Shumate: Innovator in Metallization Processes
Introduction
David A. Shumate is a notable inventor based in Phoenix, AZ, recognized for his contributions to metallization processes. He holds a total of 3 patents that showcase his expertise in the field of semiconductor manufacturing.
Latest Patents
One of his latest patents is focused on a metallization process that improves the deposition of TiW/TiWN/TiW/Au layers. This process enhances adhesion and barrier properties, making it suitable for metal line widths of one micron or smaller. The method emphasizes the importance of using substantially pure TiW in a nitrogen-free sputtering atmosphere to achieve optimal results. Another significant patent involves a sputter chamber design that features a rotatably mounted cathode and a quartz plate to prevent sputtering of spacers. This innovative design helps in maintaining the integrity of the sputtering process.
Career Highlights
David A. Shumate has made significant strides in his career while working at Motorola Corporation. His work has been instrumental in advancing technologies related to semiconductor fabrication.
Collaborations
Throughout his career, David has collaborated with notable colleagues, including Thomas R. Baker and Kevin A. Lorenzen. These collaborations have contributed to the development of innovative solutions in the field.
Conclusion
David A. Shumate's work in metallization processes has made a lasting impact on semiconductor technology. His patents reflect a commitment to innovation and excellence in the industry.