Dave E Smith

Title: The Innovations of Dave E. Smith

Introduction

Dave E. Smith is an accomplished inventor based in San Mateo, California. He has made significant contributions to the field of microcircuit fabrication through his innovative work. His expertise is particularly evident in his patented technology, which addresses critical challenges in the inspection of semiconductor materials.

Latest Patents

Dave E. Smith holds a patent for an "Electron Beam Inspection System and Method." This invention encompasses a method and apparatus for a charged particle scanning system and an automatic inspection system, which includes wafers and masks used in microcircuit fabrication. The system directs a charged particle beam at the surface of a substrate for scanning purposes. It incorporates a selection of detectors to identify secondary charged particles, back-scattered charged particles, and transmitted charged particles from the substrate. The substrate is mounted on an x-y stage, allowing for multiple degrees of freedom during scanning. Additionally, the system features an electric field on the substrate's surface to accelerate secondary charged particles, facilitating inspection at low beam energies on charge-sensitive insulating substrates.

Career Highlights

Dave E. Smith is currently employed at Kla Instruments Corporation, where he continues to develop and refine technologies that enhance microcircuit inspection processes. His work has been instrumental in advancing the capabilities of charged particle scanning systems, making them more efficient and effective.

Collaborations

Throughout his career, Dave has collaborated with notable colleagues, including Dan Meisberger and Alan D. Brodie. These partnerships have contributed to the successful development and implementation of innovative technologies in the field.

Conclusion

Dave E. Smith's contributions to the field of microcircuit fabrication through his patented electron beam inspection system exemplify his innovative spirit and technical expertise. His work continues to influence advancements in semiconductor technology, showcasing the importance of innovation in this critical industry.