Darryl Angelo is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of substrate temperature control and material deposition techniques. With a total of 3 patents to his name, his work has had a considerable impact on the industry.

Latest Patents

Darryl's latest patents include a method for improving the temperature control of a clamped substrate mounted on a substrate support. This method involves maintaining the pressure of the backside gas at at least 15 torr, which enhances the thickness uniformity of processing across the substrate. Additionally, he has developed a pressure modulation method to obtain improved step coverage of seed layers. This multi-step process allows for optimal deposition in high aspect ratio features by varying the pressure during the deposition process.

Career Highlights

Darryl Angelo is currently employed at Applied Materials, Inc., where he continues to innovate and develop new technologies. His work focuses on enhancing the efficiency and effectiveness of substrate processing techniques. His contributions have been instrumental in advancing the capabilities of plasma deposition methods.

Collaborations

Darryl has collaborated with esteemed colleagues such as Arvind Sundarrajan and Peijun Ding. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.

Conclusion

Darryl Angelo's innovative work in substrate temperature control and material deposition has established him as a key figure in his field. His patents reflect a commitment to advancing technology and improving manufacturing processes.