Daniel L Belin

Title: **Inventor Spotlight: Daniel L. Belin from Cupertino, CA**

Introduction

Daniel L. Belin is a distinguished inventor based in Cupertino, California. With a notable portfolio comprising three patents, Belin has significantly contributed to advancements in semiconductor inspection technologies. His work is particularly revered for addressing challenges in the auto-focus systems vital for die-to-die inspection.

Latest Patents

Among his recent innovations, one of the standout patents is the "Auto-focus system and methods for die-to-die inspection." This invention discloses innovative methods and apparatus designed to detect defects in semiconductor samples that possess a multitude of identically designed areas. The process utilizes an inspection tool that constructs an initial focus trajectory for the sample's first swath, scanning it while collecting essential autofocus data. Subsequently, a z offset measurement vector is formulated for each identically designed area, leading to the generation of a corrected z offset vector that standardizes z offsets across multiple areas.

Another pivotal patent by Belin is entitled "Auto focus system for reticle inspection." This patent outlines methods and apparatus related to photomask inspection. An embodiment of this invention facilitates the automatic focusing of an inspection tool on a reticle by employing various topographic mapping techniques, showcasing Belin's innovative approach to enhancing semiconductor inspection processes.

Career Highlights

Daniel L. Belin is currently affiliated with KLA-Tencor Corporation, a leading provider of process control and yield management solutions for the semiconductor industry. His tenure at KLA-Tencor has been marked by groundbreaking contributions that propel innovations in semiconductor manufacturing and quality assurance.

Collaborations

Throughout his career, Belin has collaborated with notable colleagues such as Michael J. Wright and Robert W. Walsh. These partnerships have played a crucial role in refining and advancing the technologies behind his inventions, fostering a culture of collaboration and innovation within the industry.

Conclusion

Daniel L. Belin stands out as an influential inventor in the field of semiconductor inspection technology. His commitment to innovation, evidenced by his patents and collaborations, continues to drive advancements that enhance the quality and efficiency of semiconductor manufacturing processes.