Company Filing History:
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Years Active: 2003-2005
Title: Innovations of Inventor Daniel Herr in Chapel Hill, NC
Introduction
Daniel Herr is a notable inventor based in Chapel Hill, North Carolina, recognized for his contributions to electrical device technology. With a portfolio of two patents, Herr has made significant strides in the field of lithographic processes and microelectronic structures.
Latest Patents
Daniel Herr's latest innovations include two patents focused on advanced electrical devices. The first patent pertains to an electrical device that incorporates a dielectric layer formed through a direct patterning process. This patent details a method for lithographically patterning a material on a substrate, which involves depositing a radiation-sensitive material via chemical vapor deposition, selectively exposing it to radiation to create a pattern, and subsequently developing the pattern using supercritical fluid (SCF) or a dry plasma etch. The resulting microstructure exhibits at least one two-dimensional feature with a dimensional tolerance more precise than 7%.
The second patent revolves around solventless, resistless direct dielectric patterning, disclosing processes for patterning radiation-sensitive layers. Similar to his first patent, it involves depositing a radiation-sensitive material on a substrate and utilizing supercritical fluid for development after exposure to radiation.
Career Highlights
Throughout his career, Daniel Herr has been affiliated with esteemed organizations such as the Semiconductor Research Corporation and the Cornell Research Foundation Inc. His work at these institutions has solidified his reputation as an innovator in the field of electrical devices.
Collaborations
Daniel Herr has collaborated with notable professionals like Karen K. Gleason and Christopher Kemper Ober, who have contributed their expertise to his innovative endeavors. These collaborations have enhanced the development of his patented technologies.
Conclusion
With his innovative patents and collaborations in the field of electrical devices, Daniel Herr represents a significant figure in technological advancements. His contributions, particularly in lithography and microelectronic structures, pave the way for future innovations in the industry.