Dana L Andrews

Title: Dana L Andrews: Innovator in Semiconductor Processing

Introduction

Dana L Andrews is a prominent inventor based in Mountain View, CA (US). She has made significant contributions to the field of semiconductor processing, holding a total of 6 patents. Her innovative work has advanced the technology used in the manufacturing of semiconductors.

Latest Patents

Among her latest patents is a method of heating and cooling a wafer during semiconductor processing. This invention features a clamping ring and temperature-regulated platen designed to clamp a wafer securely while regulating its temperature. The clamping force is generated by the weight of the clamping ring. Additionally, a roof shields most of the contact regions between the wafer and the clamp from depositing particles. This design ensures that a coating formed on the wafer maintains continuous contact with the clamping ring in only a few narrow regions, which act as conductive bridges when the depositing layer is conductive. Another notable patent is the physical vapor deposition clamping mechanism and heater/cooler, which shares similar innovative features aimed at enhancing semiconductor processing efficiency.

Career Highlights

Dana has worked with leading companies in the industry, including Applied Materials, Inc. and Sharp Kabushiki Kaisha Corporation. Her experience in these organizations has allowed her to refine her skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Dana has collaborated with notable professionals in her field, including Avi Tepman and Howard E Grunes. These partnerships have further enriched her work and expanded her impact on semiconductor innovations.

Conclusion

Dana L Andrews is a trailblazer in semiconductor processing, with a remarkable portfolio of patents that reflect her innovative spirit. Her contributions continue to shape the future of technology in this critical industry.