Company Filing History:
Years Active: 1996
Title: Dan Meisberger: Innovator in Electron Beam Inspection Technology
Introduction
Dan Meisberger is a notable inventor based in San Jose, California. He has made significant contributions to the field of microcircuit fabrication through his innovative work on charged particle scanning systems. His expertise and dedication to advancing technology have led to the development of a unique inspection system that enhances the efficiency of semiconductor manufacturing.
Latest Patents
Dan Meisberger holds a patent for an "Electron Beam Inspection System and Method." This invention encompasses a method and apparatus for a charged particle scanning system and an automatic inspection system, which includes wafers and masks used in microcircuit fabrication. The system directs a charged particle beam at the surface of a substrate for scanning, utilizing a selection of detectors to detect secondary charged particles, back-scattered charged particles, and transmitted charged particles from the substrate. The substrate is mounted on an x-y stage, providing at least one degree of freedom during scanning. Additionally, the system subjects the substrate to an electric field to accelerate secondary charged particles, facilitating inspection at low beam energies on charge-sensitive insulating substrates. The invention also features an optical alignment system and a vacuum system for efficient operation.
Career Highlights
Dan Meisberger is currently employed at Kla Instruments Corporation, where he continues to innovate and contribute to advancements in inspection technologies. His work has been instrumental in improving the accuracy and efficiency of semiconductor manufacturing processes.
Collaborations
Dan has collaborated with esteemed colleagues, including Alan D Brodie and Anil A Desai, who have contributed to his projects and innovations in the field.
Conclusion
Dan Meisberger's contributions to electron beam inspection technology exemplify his commitment to innovation in the semiconductor industry. His patent and ongoing work at Kla Instruments Corporation highlight his role as a key player in advancing microcircuit fabrication techniques.