This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 1997.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1997
Title: Dale Robert DuBois: Innovator in CVD Susceptor Technology
Introduction
Dale Robert DuBois is an accomplished inventor based in Los Gatos, California. With a significant contribution to the field of chemical vapor deposition (CVD) processes, he is recognized for his innovative work in thermal management solutions for semiconductor manufacturing.
Latest Patents
Dale Robert DuBois holds one patent titled "Resistance Heated Stem Mounted Aluminum Susceptor Assembly." This invention focuses on improving the durability and efficiency of susceptors made from thermally conductive ceramics, particularly aluminum nitride. The patent outlines a system wherein embedded heater elements and RF electrodes are safeguarded from the harsh plasma environment, ensuring enhanced performance and longevity. The design incorporates conductors protected from process chamber exposure, utilizing a cylindrical member filled with inert gas for wafers' support. Additionally, the assembly allows for vacuum and purge gas distribution, making it vital for effective wafer handling in semiconductor fabrication.
Career Highlights
Currently, Dale is associated with Applied Materials, a leader in the manufacturing and supply of equipment and services for the semiconductor, flat panel display, and solar industries. His expertise in materials science and manufacturing processes positions him at the forefront of innovation in semiconductor technology.
Collaborations
Dale has collaborated with notable experts in the field, including Michio Aruga and Atsunobu Ohkura. Working alongside such talented individuals has contributed to the development and refinement of cutting-edge technologies within the semiconductor industry.
Conclusion
Dale Robert DuBois's inventive contributions, particularly in the realm of CVD processes with his patented aluminum susceptor assembly, highlight his vital role in advancing semiconductor technology. His work not only enhances production efficiency but also exemplifies the continuing evolution of materials and techniques in this critical sector.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile