Company Filing History:
Years Active: 1998-2006
Title: Dale L. Hetherington: Innovator in Microfluidics and MEMS Technologies
Introduction
Dale L. Hetherington is a prominent inventor based in Albuquerque, NM (US). He has made significant contributions to the fields of microfluidics and microelectromechanical systems (MEMS). With a total of 5 patents, Hetherington's work has advanced the capabilities of microfluidic devices, which are essential in various applications.
Latest Patents
One of Hetherington's latest patents is for a micro-fluidic interconnect. This apparatus is designed to simultaneously align and interconnect microfluidic ports, which is crucial for utilizing microfluidic devices fabricated in MEMS technologies. These devices often have multiple fluidic access ports, such as those with a diameter of 100 microns, within a compact footprint of 3 mm by 6 mm. The fanout of smaller ports to larger diameters, like 500 microns, facilitates the packaging and interconnection of microfluidic devices to printed wiring boards, electronics packages, and fluidic manifolds. Another notable patent involves a process for fabricating a microelectromechanical structure. This process outlines the formation of a MEM structure on a substrate with multiple layers of deposited and patterned polysilicon. It addresses the challenges posed by the substrate's curvature due to accumulated stress and introduces stress-compensation layers to enable further processing.
Career Highlights
Dale L. Hetherington is currently associated with Sandia Corporation, where he continues to innovate in the field of MEMS and microfluidics. His work has not only contributed to technological advancements but has also positioned him as a key figure in his industry.
Collaborations
Hetherington has collaborated with notable coworkers, including Jeffry Joseph Sniegowski and Carole C. Barron, who have contributed to his research and development efforts.
Conclusion
Dale L. Hetherington's contributions to microfluidics and MEMS technologies have established him as a leading inventor in his field. His innovative patents and ongoing work at Sandia Corporation continue to influence the advancement of these critical technologies.