This inventor holds 3 USPTO granted patents and 5 published patent applications. Top assignees: Screen Holdings Co., Ltd., Screen Holdings Co., Ltd.. Active years: 2023-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2023-2026
Title: Daiki Uehara: Innovator in Substrate Processing Technology
Introduction
Daiki Uehara is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing technology, holding 3 patents that showcase his innovative approach to enhancing processing apparatuses.
Latest Patents
Uehara's latest patents include a substrate processing apparatus designed to process a surface of a substrate using a processing fluid in a supercritical state. This invention protects the substrate from pressure fluctuations caused by the partial vaporization of the processing fluid within the flow path. The apparatus features a chamber housing with a processing space for the substrate and a flow path that guides the processing fluid to the processing space. Additionally, it includes a fluid supply part that pressure-feeds the processing fluid, incorporating multiple bent parts to change the flow direction effectively.
Another notable patent is also a substrate processing apparatus that processes a surface of a substrate. This design includes a support tray with a concave part for housing the substrate and a storage container with a cavity for storing the support tray in a horizontal posture. The fluid supply part in this apparatus supplies the processing fluid to the cavity, ensuring efficient processing.
Career Highlights
Uehara is currently employed at Screen Holdings Co., Ltd., where he continues to develop innovative technologies in substrate processing. His work has significantly impacted the efficiency and effectiveness of processing apparatuses in various applications.
Collaborations
Uehara collaborates with notable coworkers, including Noritake Sumi and Masanobu Sato, who contribute to the innovative environment at Screen Holdings Co., Ltd.
Conclusion
Daiki Uehara's contributions to substrate processing technology reflect his dedication to innovation and excellence. His patents demonstrate a commitment to advancing the field and improving processing techniques.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile