Company Filing History:
Years Active: 2024
Title: Daekeon Kim - Innovator in Semiconductor Technology
Introduction
Daekeon Kim is an inventor based in Suwon-si, South Korea. He is known for his contributions to the field of semiconductor technology, particularly in methods related to extreme ultraviolet (EUV) dose prediction. Although he currently holds no granted patents, his innovative ideas are reflected in his patent applications.
Latest Patent Applications
Daekeon Kim's notable patent application is titled "METHOD OF PREDICTING EUV DOSE, METHOD OF DESIGNING PAG USING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME." This application outlines a method for predicting EUV dose by analyzing the entire photochemical reaction mechanism until a photoacid generator (PAG) molecule releases a proton from a PAG-cation under EUV exposure. The process involves obtaining the lowest unoccupied molecular orbital (LUMO) energy level through simulations for structural optimization of the PAG-cation. Additionally, it includes obtaining an extra parameter from simulations of intermediate molecular structures formed during the reaction mechanism. A two-parameter linear regression model for predicting the EUV dose is derived based on the LUMO energy level and the additional parameter.
Conclusion
Daekeon Kim is an emerging inventor in the semiconductor field, with a focus on innovative methods for predicting EUV doses. His work has the potential to significantly impact semiconductor manufacturing processes.