The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Aug. 05, 2020
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Thanh Cuong Nguyen, Hwaseong-si, KR;
Daekeon Kim, Hwaseong-si, KR;
Tsunehiro Nishi, Seongnam-si, KR;
Naoto Umezawa, Seongnam-si, KR;
Hyunwoo Kim, Seongnam-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 25/13 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 25/13 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); H01L 21/0274 (2013.01);
Abstract
Disclosed are resist compositions and semiconductor device fabrication methods wing the same. The resist composition comprises a hypervalent iodine compound of Chemical Formula 1 below. Wherein Rto Rare as defined herein.