Daehoon Han

Title: Innovations of Daehoon Han in Semiconductor Measurement Technology

Introduction

Daehoon Han is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor measurement technology. With a total of 3 patents to his name, his work has advanced the capabilities of semiconductor analysis.

Latest Patents

One of Daehoon Han's latest patents is a semiconductor measurement apparatus that includes an illumination unit with a light source and at least one illumination polarization element. This apparatus also features a light receiving unit with at least one light-receiving polarization element positioned on the path of light reflected by a sample. An image sensor is included to receive light passing through the light-receiving polarization element and output an original image. The control unit processes this original image to determine a selected critical dimension among the critical dimensions of a structure within the sample. The control unit can obtain multiple sample images by selecting regions of the original image where interference peaks appear, allowing for the determination of elements included in a Mueller matrix and the selected critical dimension based on these elements.

Another patent by Daehoon Han describes a semiconductor measurement apparatus that is designed to irradiate light onto a sample. This apparatus includes an image sensor that receives light reflected from the sample and outputs multiple interference images representing the interference patterns of polarization components of light. An optical unit, which includes an objective lens above the sample, is also part of the design. The control unit processes the multi-interference image to obtain measurement parameters determined from the polarization components at various azimuth angles. This allows for the determination of a selected critical dimension to be measured from a structure in the sample.

Career Highlights

Daehoon Han is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in semiconductor technologies. His work has been instrumental in enhancing the precision and efficiency of semiconductor measurements.

Collaborations

Daehoon Han has collaborated with notable coworkers such as Sungho Jang and Jinseob Kim. Their combined expertise has contributed to the successful development of advanced semiconductor measurement technologies.

Conclusion

Daehoon Han's contributions to semiconductor measurement technology through his innovative patents have significantly impacted the field. His work at Samsung Electronics Co., Ltd. showcases his commitment to advancing technology in this critical area.