Company Filing History:
Years Active: 2022-2024
Title: Daebeom Lee: Innovator in Plasma Processing Technology
Introduction
Daebeom Lee is a notable inventor based in Chungcheongbuk-do, South Korea. He has made significant contributions to the field of plasma processing technology, holding two patents that showcase his innovative approach to semiconductor manufacturing.
Latest Patents
His latest patents include a plasma processing system designed to enhance the efficiency of semiconductor device manufacturing. This system features a radio-frequency (RF) power source unit that generates three distinct RF powers. The process chamber is equipped to receive a process gas, to which the RF powers are applied to generate plasma. An impedance matcher is integrated between the RF power source unit and the process chamber, allowing for impedance adjustments. The RF power source unit consists of a first RF power source connected to a first electrode in the lower portion of the process chamber, applying a first RF power at a specific frequency. Additionally, a second RF power source is connected to the first electrode to apply a second RF power at a different frequency, while a third RF power source is connected to a second electrode in the upper portion of the process chamber to apply a third RF power at yet another frequency.
Career Highlights
Daebeom Lee is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative technologies in the semiconductor industry. His work has been instrumental in advancing plasma processing techniques, which are crucial for modern electronics.
Collaborations
He collaborates with talented coworkers, including Jaewon Jeong and Juho Lee, who contribute to the innovative environment at Samsung Electronics.
Conclusion
Daebeom Lee's contributions to plasma processing technology reflect his dedication to innovation in the semiconductor field. His patents not only enhance manufacturing processes but also pave the way for future advancements in technology.