Company Filing History:
Years Active: 2025
Title: Da Som Bae - Innovator in Plasma Processing Technology
Introduction
Da Som Bae is a notable inventor based in Seoul, South Korea. He has made significant contributions to the field of substrate processing technology, particularly through his innovative patent that enhances plasma uniformity.
Latest Patents
Da Som Bae holds a patent for a substrate processing apparatus and method using plasma. This invention provides a substrate processing apparatus that maximizes plasma uniformity. The apparatus includes a processing space for substrate processing and a plasma generating module. The module features multiple first electrodes arranged in parallel in one direction and second electrodes in a different direction. It also includes an array of micro plasma cells connected to these electrodes. The method involves supplying process gas to the micro plasma cells and reaction gas to the processing space. Notably, different energy levels are applied to various micro plasma cells, resulting in varying amounts of radicals in the generated plasma.
Career Highlights
Da Som Bae is currently employed at Semes Co., Ltd., where he continues to develop innovative technologies in substrate processing. His work focuses on improving the efficiency and effectiveness of plasma applications in various industries.
Collaborations
Da Som Bae collaborates with Wan Jae Park, contributing to advancements in their field through shared expertise and innovative ideas.
Conclusion
Da Som Bae's contributions to plasma processing technology exemplify the impact of innovation in enhancing industrial processes. His patent reflects a commitment to advancing technology and improving efficiency in substrate processing applications.