Da In Sung

Title: Inventor Spotlight: Da In Sung from Daejeon, KR

Introduction

Da In Sung, an innovative inventor hailing from Daejeon, South Korea, has made significant contributions to the field of plasma technology. With a total of two patented inventions, he has demonstrated a commitment to advancing technological solutions in industrial applications.

Latest Patents

Da In Sung's latest patents include an "Ion Beam Etching Apparatus," which is designed to enhance the precision of etching processes. This innovative apparatus features a plasma chamber for generating plasma from process gas, a plasma valve, an ion-beam source for extracting ions, and an etching chamber for accommodating the object to be etched. The system is built with at least one exhausting pump to manage the exhaust of radicals during the etching process, proving to be an essential tool in the semiconductor manufacturing industry.

Another noteworthy patent is for an "Apparatus for Generating Plasma and Apparatus for Treating Substrate Having the Same." This device utilizes an inductively-coupled plasma-generating system that incorporates high and low-frequency power supplies, alongside a single coil-based plasma source comprising two antennas. The system is designed to efficiently excite gas into plasma, thereby enhancing substrate treatment, which is critical for various applications in material science.

Career Highlights

Da In Sung is associated with the Research and Business Foundation at Sungkyunkwan University, where he utilizes his expertise to further research in plasma applications. His role not only involves innovation but also mentoring and guiding future inventors and researchers in the field.

Collaborations

Collaborating with prominent colleagues such as Geun Young Yeom and Kyung Chae Yang, Da In Sung has been able to push the boundaries of plasma technology. Their combined efforts in research have led to fruitful discussions and advancements in their respective projects, further enhancing their institute’s reputation as a leader in technological innovation.

Conclusion

Through his inventive spirit and dedication, Da In Sung continues to make a profound impact in the field of plasma technology. His patents and collaborations reflect his commitment to innovation, establishing him as a noteworthy figure in the landscape of modern inventions. With ongoing projects and research, the future looks promising for this talented inventor from Daejeon, KR.