Company Filing History:
Years Active: 2017-2018
Title: Innovations of Chunsheng Chen
Introduction
Chunsheng Chen is a notable inventor based in Tianjin, China. He has made significant contributions to the field of technology, particularly in the area of processing chambers and substrate integrity. With a total of 3 patents, his work has advanced the capabilities of manufacturing processes.
Latest Patents
One of his latest patents is focused on the detection of grounding strap breakage. This invention relates to a method for detecting the breakage of one or more grounding straps without stopping processing or opening the processing chamber for inspection. The method involves monitoring real-time RF related data from plasma generated in the processing chamber and comparing it with pre-determined threshold RF related data. An alert is generated if the real-time RF related data meets or exceeds the threshold. The RF related data includes RF frequency, direct current voltage, voltage peak-to-peak, and RF reflected power.
Another significant patent by Chunsheng Chen involves the application of in-line glass edge-inspection and alignment check in display manufacturing. This invention describes methods and apparatus for determining substrate integrity and alignment. The devices can include a transfer chamber, one or more process chambers, and a loadlock chamber, along with optical devices and a radiation source. The methods involve delivering a substrate to a process chamber, activating the optical device and radiation source, capturing images, and comparing the substrate edge pattern to an expected edge pattern to determine edge variance.
Career Highlights
Chunsheng Chen is currently employed at Applied Materials, Inc., where he continues to innovate and contribute to advancements in technology. His work has been instrumental in improving manufacturing processes and ensuring quality control in production.
Collaborations
Chunsheng has collaborated with notable coworkers such as Ilias Iliopoulos and Shuo Na, further enhancing the innovative environment at Applied Materials, Inc.
Conclusion
Chunsheng Chen's contributions to technology through his patents and work at Applied Materials, Inc. highlight his role as a significant inventor in the field. His innovative methods for detecting grounding strap breakage and ensuring substrate integrity are paving the way for advancements in manufacturing processes.