Chun-Hsiung Chen

Title: Innovations of Chun-Hsiung Chen in Semiconductor Technology

Introduction

Chun-Hsiung Chen is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 5 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor processes through innovative technologies.

Latest Patents

One of his latest patents is an exposure device and method designed for semiconductor manufacturing. This invention emphasizes the creation of exposure patterns with High Dynamic Range (HDR) capabilities. The exposure device comprises a laser source, a first spatial light modulator (SLM), specifically a Liquid Crystal on Silicon (LCOS) device, and a second SLM, specifically a Digital Micromirror Device (DMD). The LCOS is strategically positioned upstream in the optical path and is optimized for modulating the phase of the laser. It directs the laser light towards specific areas on the DMD, which is crucial for enhancing detail and contrast in exposure patterns. The DMD, located downstream, consists of micromirrors that modulate the amplitude of the reflected laser, essential for achieving HDR in exposure patterns. This cooperative interaction between the LCOS and DMD allows for the creation of exposure patterns with a wide range of light intensities, from very bright to very dark, thereby achieving high dynamic range.

Another notable patent is a method for cleaning semiconductor process equipment and the system associated with it. This method is designed to apply to an object with at least one pollutant present. It includes steps of providing multi-channel optical tweezers to irradiate the pollutant and nearby locations, allowing the optical tweezers to generate a resultant force on the pollutant. Additionally, an airflow is provided to the object. The resultant force exceeds the maximum static friction between the pollutant and the object, effectively removing the pollutant.

Career Highlights

Chun-Hsiung Chen is currently employed at Princeton Technology Corporation, where he continues to innovate in the semiconductor field. His work has significantly impacted the efficiency of semiconductor manufacturing processes.

Collaborations

Chun-Hsiung has collaborated with notable colleagues, including Wan-Chen Chuang and Chun-Jung Chiu, contributing to advancements in their shared field of expertise.

Conclusion

Chun-Hsiung Chen's innovative contributions to semiconductor technology demonstrate his commitment to advancing the industry.