Chun-Geun Park is a notable inventor based in Kyunggi-do, South Korea. He has made significant contributions to the field of photosensitive polymers, holding a total of 6 patents. His work primarily focuses on developing advanced materials for use in chemically amplified photoresists.

Latest Patents

One of his latest patents involves photosensitive polymers and chemically amplified photoresist compositions. These compounds belong to a class of photosensitive polymers designed for use in chemically amplified photoresists. The photoresists developed from these polymers produce sharp line patterns when exposed to an ArF excimer laser. The polymer composition includes a copolymer, while the photoresist composition features a terpolymer with a photo acid generator. The resulting chemically amplified photoresist compositions exhibit strong resistance to dry etching, excellent adhesion to film materials, and compatibility with conventional developers.

Career Highlights

Chun-Geun Park is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the field of materials science. His work has been instrumental in advancing the technology behind photoresists, which are critical in the semiconductor manufacturing process.

Collaborations

He has collaborated with notable colleagues such as Sang-Jun Choi and Yool Kang, contributing to the development of cutting-edge technologies in their field.

Conclusion

Chun-Geun Park's contributions to the field of photosensitive polymers and chemically amplified photoresists highlight his role as a leading inventor in the industry. His innovative work continues to impact the technology used in semiconductor manufacturing.

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