Chun-Cho Chen

Title: Innovations by Chun-Cho Chen

Introduction

Chun-Cho Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in improving the electrical properties of gate structures.

Latest Patents

Chun-Cho Chen holds a patent titled "Method for improving the electrical property of gate in polycide." This invention discloses a method that enhances the electrical properties of gates in polycide structures. The process begins with the formation of a gate oxide layer on a silicon substrate. Key steps include forming a highly-doped polysilicon layer on the gate oxide, followed by an undoped amorphous silicon layer, and finally a tungsten silicon layer. The invention addresses issues such as the peeling of tungsten silicide after annealing and the degradation of electrical properties due to fluorine atom diffusion.

Career Highlights

Chun-Cho Chen is currently employed at Holtek Microelectronics Inc., where he continues to innovate in the semiconductor industry. His work has led to advancements that improve the performance and reliability of electronic devices.

Collaborations

Chun-Cho Chen has collaborated with Pei-Ren Jeng, contributing to the development of innovative solutions in their field.

Conclusion

Chun-Cho Chen's contributions to semiconductor technology through his patent demonstrate his commitment to innovation and improvement in electrical properties of gate structures. His work continues to influence the industry positively.