Chun-Chieh Wang

Title: Innovations by Chun-Chieh Wang in Semiconductor Technology

Introduction

Chun-Chieh Wang is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent. His work focuses on improving the manufacturing processes of semiconductor devices, which are essential in modern electronics.

Latest Patents

Chun-Chieh Wang holds a patent titled "Method of in-situ selective metal removal via gradient oxidation for gapfill." This patent describes a method and apparatus designed for gap-fill in semiconductor devices. The process involves forming a metal seed layer on an exposed surface of the substrate, which contains features such as trenches or vias. A gradient oxidation process is then performed to oxidize the exposed portions of the metal seed layer, preferentially targeting the field region of the substrate. Following this, an etch back process is executed to remove or reduce the oxidized portion of the seed layer, ultimately allowing for a metal gap-fill process that fills or partially fills the features with a gap fill material. This innovative approach enhances the efficiency and effectiveness of semiconductor manufacturing.

Career Highlights

Chun-Chieh Wang is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has allowed him to apply his expertise in semiconductor technology and contribute to advancements in the field. With a total of 1 patent, he has demonstrated his commitment to innovation and excellence in his career.

Collaborations

Chun-Chieh Wang has collaborated with notable colleagues such as Jiang Lu and Zhenjiang Cui. These collaborations have likely contributed to the development of his innovative ideas and patents, fostering a productive environment for technological advancement.

Conclusion

Chun-Chieh Wang's contributions to semiconductor technology through his innovative patent highlight his role as a significant inventor in the field. His work continues to influence the manufacturing processes of semiconductor devices, showcasing the importance of innovation in technology.