This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2004.
Company Filing History:
Years Active: 2004
Title: Christopher R. McGuirk: Innovator in Electro-Chemical Polishing Technology
Introduction
Christopher R. McGuirk is a notable inventor based in San Jose, California. He has made significant contributions to the field of electro-chemical polishing, particularly through his innovative patent. His work is essential in enhancing the efficiency of metal layer polishing processes.
Latest Patents
Christopher R. McGuirk holds a patent for an electro-chemical polishing apparatus. This invention provides a method and apparatus for electro-chemical polishing a metal layer disposed on a substrate. The apparatus includes a substrate support with multiple contact members, a cathode, and at least one nozzle. The nozzle is designed to centrally dispense polishing fluid onto the substrate, while the cathode connects the polishing fluid to a negative terminal of a power source. The positive terminal is linked through the contact members to the conductive layer of the substrate. This design creates a turbulent flow in the polishing fluid, enhancing the polishing rate at the center of the substrate.
Career Highlights
Christopher is associated with Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at this organization has allowed him to develop and refine his innovative ideas in electro-chemical polishing technology.
Collaborations
Throughout his career, Christopher has collaborated with notable colleagues, including Joseph Yahalom and Srinivas Gandikota. These collaborations have contributed to the advancement of technology in their respective fields.
Conclusion
Christopher R. McGuirk is a distinguished inventor whose work in electro-chemical polishing technology has made a significant impact. His patent demonstrates his commitment to innovation and efficiency in manufacturing processes.
