This inventor holds 1 USPTO granted patent. Top assignee: Philips Semiconductors Inc.. Active years: 2001.
Company Filing History:
Years Active: 2001
Title: Christopher D Van Dyne: Innovator in Electrode Technology
Introduction
Christopher D Van Dyne is an accomplished inventor based in Lakehills, Texas. He has made significant contributions to the field of semiconductor technology, particularly through his innovative designs and patents. His work focuses on improving the efficiency and effectiveness of electrode assemblies used in various applications.
Latest Patents
Christopher D Van Dyne holds a patent for an invention titled "Electrically Planar Upper Electrode Cover." This invention comprises the electrode assemblies themselves as well as an improved plasma plate. The plasma side of the plate is counter bored in the area of the gas inlet holes to an appropriate depth. On the opposite side of the plate, another set of bores are placed around the outsides of the gas inlet feed throughs. These bores are machined to incorporate a set of metallic sleeves. The counter bore on the plasma side of the ceramic is used as the first step in removing the plasma from the ceramic surface. The metallic sleeves are utilized to prevent the plasma from invading the counter bore and touching the surface, allowing the surface to remain electrically uniform and planar to the substrate being etched. The sleeves create a negative charge close to the surface of the ceramic surface but not exposed to the plasma, creating a dark space. This dark space mimics an electrically planar surface for the substrate while keeping the hot plasma from direct contact with the ceramic surface.
Career Highlights
Christopher D Van Dyne has worked with Philips Semiconductors Inc., where he has applied his expertise in semiconductor technology. His innovative approach has led to advancements in the design and functionality of electrode assemblies, contributing to the overall progress in the field.
Collaborations
Due to space constraints, the collaborations section will be omitted.
Conclusion
Christopher D Van Dyne is a notable inventor whose work in electrode technology has made a significant impact in the semiconductor industry. His patent for the electrically planar upper electrode cover showcases his innovative thinking and dedication to improving technology.