Choung-bae Park

Title: Choung-bae Park and a Vertical Diffusion Furnace Boat

Introduction

Choung-bae Park is an inventor associated with Suwon, South Korea, and Samsung Electronics Co., Ltd. His patent work includes a design for a boat used in a vertical diffusion furnace, a component that supports wafers during semiconductor processing. Park is credited with 1 patent.

Latest Patents

Park’s listed patent, “Boat for Vertical Diffusion Furnace,” describes a structure with parallel upper and lower disks connected by wafer-holding bars. First bars face one another along a center plane and contain slots for holding wafers. Second bars, positioned at an angle relative to an orthogonal center plane, provide corresponding slots.

The design also includes auxiliary bars adjacent to the main bars, with optional horizontal supporting bars connecting the auxiliary bars. These supports are intended to reduce thermal deformation of the first bars, help prevent wafers from slipping out of their slots, and extend the boat’s service life.

Career Highlights

Park’s documented invention addresses the mechanical stability of wafer-support equipment exposed to the high temperatures of diffusion-furnace processing. The patent’s arrangement of bars and supports aims to maintain wafer positioning while limiting deformation.

Collaborations

Park’s listed coworkers include Jong-moon Yang and Sang-woon Kim. His company affiliation is Samsung Electronics Co., Ltd.

Conclusion

Choung-bae Park’s patent describes a reinforced vertical diffusion furnace boat designed to improve wafer retention, reduce thermal deformation, and support longer equipment life.