Chorong Park

Title: Innovations of Chorong Park in Semiconductor Technology

Introduction

Chorong Park is a notable inventor based in Seongnam-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on advanced methods for fabricating semiconductor devices, which are crucial for modern electronics.

Latest Patents

One of his latest patents is a method of fabricating a three-dimensional semiconductor memory device. This method involves forming a cell stack layer that covers key and cell regions of a substrate. It includes a variable resistance layer and a switching layer. The process also entails forming key mask patterns on the cell stack layer of the key region and cell mask patterns on the cell stack layer of the cell region. By etching the cell stack layer using these patterns as an etching mask, a plurality of key patterns and memory cells are created. Each memory cell consists of a variable resistance pattern and a switching pattern, while each key pattern includes a dummy variable resistance pattern and a dummy switching pattern.

Another significant patent involves an overlay correction method, which includes measuring the overlay between center lines of lower and upper patterns on a wafer. This method also describes how to evaluate the overlay correction operation and fabricate a semiconductor device using the overlay correction method. The overlay correction method may involve fitting components of the overlay with a polynomial function to construct a correction model, which is essential for improving the accuracy of semiconductor manufacturing.

Career Highlights

Chorong Park is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to contribute to cutting-edge technologies that drive innovation in semiconductor devices.

Collaborations

He has collaborated with talented coworkers such as Hyunjay Kang and Doogyu Lee, who share his passion for advancing semiconductor technology.

Conclusion

Chorong Park's innovative work in semiconductor technology has led to significant advancements in the field. His patents reflect a deep understanding of complex fabrication methods that are essential for the future of electronics.