Company Filing History:
Years Active: 1987-1989
Title: Innovations by Chorng-Tao Yu in Semiconductor Processing
Introduction
Chorng-Tao Yu is a notable inventor based in Placentia, CA, who has made significant contributions to the field of semiconductor processing. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of diffusion furnaces used in the semiconductor industry.
Latest Patents
Yu's latest patents include a "Hot wall diffusion furnace and method for operating the furnace." This innovation involves a diffusion furnace designed for processing semiconductor wafers standing on edge. The furnace features vertically adjacent electrical resistance heating elements wired in parallel and positioned above the wafers. This configuration allows for variable heat input, optimizing the processing conditions. In a preferred embodiment, the heating elements in the upper section of the tube are connected in one circuit, while those in the lower section are connected in a second circuit, with each circuit controlled based on the temperature in its respective section.
Another significant patent is the "Diffusion furnace multizone temperature control." This invention addresses the substantial heat loss and temperature drop that occurs when a batch of room-temperature wafers is loaded into a hot-wall diffusion tube. By utilizing thermocouples to sense both the temperature of the tube atmosphere and the heating element surrounding the zone, the system can quickly recover the temperature. The signals from the thermocouples are mixed to produce a ratio average signal, which then controls the heat input to the heating elements based on the sensed temperature.
Career Highlights
Chorng-Tao Yu is currently employed at Thermco Systems, Inc., where he continues to innovate in the field of semiconductor processing. His work has been instrumental in developing technologies that improve the performance and reliability of diffusion furnaces.
Collaborations
Yu has collaborated with notable colleagues, including Michael A. Fisk and Alan Emami, contributing to advancements in semiconductor technology through teamwork and shared expertise.
Conclusion
Chorng-Tao Yu's contributions to semiconductor processing through his innovative patents demonstrate his commitment to advancing technology in this critical field. His work continues to influence the efficiency of semiconductor manufacturing processes.