Company Filing History:
Years Active: 2003-2011
Title: Chingwen Yeh: Innovator in MEMS Technology
Introduction
Chingwen Yeh is a prominent inventor based in Cupertino, CA, known for his contributions to micro-electro-mechanical systems (MEMS) technology. With a total of 2 patents, he has made significant advancements in the field, particularly in the development of innovative devices and processes.
Latest Patents
One of Chingwen Yeh's latest patents is the "Surface micromachining process of MEMS ink jet drop ejectors on glass substrates." This invention involves a method and device for forming a membrane by providing a glass substrate and depositing a thin layer of chromium on it. The chromium layer is patterned to create a deflection electrode and interconnect leads. A sacrificial layer of aluminum is then deposited and patterned to define anchor regions. A thick layer of chromium is subsequently deposited and patterned to form a membrane, which is released by etching the sacrificial layer.
Another notable patent is the "Integrated micro-opto-electro-mechanical laser scanner." This device is configured from a silicon-on-insulator substrate, which includes a silicon substrate layer, a buried oxide layer, and a single crystal silicon device layer. The first device layer portion features a micro-mirror, while a laser is connected to a second device layer portion. A hinge made from a bimorph material connects the two portions, allowing the micro-mirror to move and reflect laser light emitted from the laser.
Career Highlights
Chingwen Yeh is currently employed at Xerox Corporation, where he continues to push the boundaries of MEMS technology. His work has been instrumental in developing advanced solutions that enhance the functionality and efficiency of various devices.
Collaborations
Throughout his career, Chingwen has collaborated with notable colleagues, including Decai Sun and Michel A Rosa. These partnerships have contributed to the successful development of innovative technologies and patents.
Conclusion
Chingwen Yeh's contributions to MEMS technology through his patents and work at Xerox Corporation highlight his role as a leading inventor in the field. His innovative approaches continue to shape the future of micro-electro-mechanical systems.