Ching-Yi Hung

Title: Innovator Spotlight: Ching-Yi Hung

Introduction: Meet Ching-Yi Hung, a prolific inventor based in Taipei, Taiwan, who has made significant contributions to the field of metrology with his groundbreaking patents.

Latest Patents: Ching-Yi Hung holds two recent patents for a metrology method and apparatus, computer program, and lithographic system. His inventions involve a method for measuring a parameter of a lithographic process by obtaining measurements of structural and target asymmetry, determining relationship functions, and calculating corrected overlay values to account for structural contributions. These innovations have the potential to revolutionize the field of metrology.

Career Highlights: Ching-Yi Hung currently works at ASML Netherlands B.V., a leading company in the semiconductor industry known for its cutting-edge lithography technology. With his expertise and inventive spirit, Hung has played a vital role in advancing metrology methods essential for enhancing lithographic processes.

Collaborations: In his professional journey, Ching-Yi Hung has collaborated with talented individuals like Si-Han Zeng and Yue-Lin Peng. Together, they have contributed to pioneering research and development projects aimed at improving lithographic systems and processes.

Conclusion: Ching-Yi Hung's dedication to innovation and his remarkable contributions to metrology underscore his status as a visionary in the field. His patents and collaborations reflect his commitment to pushing the boundaries of technological advancement, making him a key figure in the world of inventors and innovators.