Ching W Lai

Title: The Innovative Contributions of Ching W Lai

Introduction

Ching W Lai is a notable inventor based in San Jose, California. She has made significant contributions to the field of semiconductor technology, particularly in the development of metal contact systems for integrated field-effect transistors (IGFETs). Her work has been instrumental in advancing the efficiency and performance of electronic devices.

Latest Patents

Ching W Lai holds a patent for "Refractory metal contacts for IGFETS." This innovative patent describes a metal contact system for an IGFET that features shallow source and drain. The system includes a refractory metal silicide layer that forms a low-resistance ohmic contact to a silicon surface. Additionally, it incorporates a layer of another refractory metal on the silicide layer to serve as a barrier against the diffusion of interconnect metal. The interconnect metal layer is placed over the diffusion barrier layer. The refractory metal layers are deposited by sputtering platinum or platinel for the first layer and titanium-tungsten for the second layer. In metal gate construction, an additional layer of chromium is utilized as an etch-resistant mask to protect the refractory metal layers from chemical attack during the removal of silicon nitride.

Career Highlights

Ching W Lai has had a successful career at Signetics, where she has contributed her expertise in semiconductor technology. Her innovative approaches have led to advancements in the manufacturing processes of electronic components.

Collaborations

Throughout her career, Ching has collaborated with esteemed colleagues such as Hans J Sigg and Warren C Rosvold. These collaborations have fostered an environment of innovation and have led to the successful development of new technologies.

Conclusion

Ching W Lai's contributions to the field of semiconductor technology exemplify her dedication to innovation and excellence. Her patent for refractory metal contacts has paved the way for advancements in electronic devices, showcasing her impact on the industry.