This inventor holds 1 USPTO granted patent. Top assignee: Digital Equipment Corporation. Active years: 1992.
Company Filing History:
Years Active: 1992
Title: Innovations of Ching-Tai S Wang
Introduction
Ching-Tai S Wang is a notable inventor based in Worcester, MA (US). He has made significant contributions to the field of integrated circuits, particularly through his innovative patent related to planarization processes.
Latest Patents
Ching-Tai S Wang holds a patent for a "Planarization process for trench isolation in integrated circuit." This method involves planarizing the surface of a silicon wafer that employs trench isolation. The process allows for trenches and active areas of varying widths to be effectively managed. The technique includes covering the trenches and active areas with a conformal coating of silicon oxide, which is then subjected to an etch to create sidewall spacers of oxide. A series of photoresist layers are applied and patterned to ensure a substantially planar surface, minimizing height variations across different areas.
Career Highlights
Ching-Tai S Wang has worked at Digital Equipment Corporation, where he has been instrumental in advancing technologies related to integrated circuits. His expertise in planarization processes has contributed to the efficiency and effectiveness of semiconductor manufacturing.
Collaborations
Ching-Tai S Wang has collaborated with Gregory J Grula, who is also a prominent figure in the field. Their partnership has fostered innovation and development in integrated circuit technologies.
Conclusion
Ching-Tai S Wang's contributions to the field of integrated circuits through his innovative patent demonstrate his expertise and commitment to advancing technology. His work continues to influence the semiconductor industry and pave the way for future innovations.