Company Filing History:
Years Active: 2021
Title: The Innovations of Ching-Hua Chen in Semiconductor Support Technology
Introduction
Ching-Hua Chen, an innovative inventor based in Zhubei, Taiwan, has made notable contributions to the field of semiconductor technology. With a keen focus on enhancing substrate support methods, Chen's work is an example of the critical role inventors play in advancing technology for efficient manufacturing processes.
Latest Patents
Chen holds a patent for an "Adjustable Substrate Support and Adjustment Method." This patent describes a sophisticated stage designed to support semiconductor substrates. The stage features a platform with multiple apertures and burls that protrude from these apertures. These burls contain support surfaces that ensure proper support for regions of the semiconductor substrate. Additionally, the stage is equipped with an actuator linked to one of the burls, allowing for the elevation of the burl's support surface. The integrated control circuitry enables precise adjustments, maintaining a planar alignment between the support surfaces of various burls, thereby optimizing the substrate support process.
Career Highlights
Ching-Hua Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor industry. Chen’s work contributes to TSMC’s reputation for innovation and high-quality manufacturing processes. His singular patent underscores his ability to develop impactful technologies that support the next generation of semiconductor applications.
Collaborations
In his professional journey, Chen collaborates closely with his colleague, Kai-Fa Ho. Their partnership likely synergizes their skill sets, fostering an innovative environment that promotes technological breakthroughs in semiconductor support systems and manufacturing practices.
Conclusion
Ching-Hua Chen exemplifies how individual inventors can drive significant advancements in technology. His patent for an adjustable substrate support illustrates the importance of innovation in enhancing the precision and efficiency of semiconductor manufacturing. As he continues his endeavors at Taiwan Semiconductor Manufacturing Company Limited, the impact of his work will likely contribute to the evolution of the semiconductor industry.