Location History:
- Tokyo, JP (1986)
- Matsudo, JP (1997)
Company Filing History:
1 out of 2,916 
1 out of 52,751 
1 out of 1,033 Years Active: 1986-1997
Title: Chikara Itoh: Innovator in Pattern Evaluation and Electron Beam Technology
Introduction
Chikara Itoh is a notable inventor based in Matsudo, Japan. He has made significant contributions to the fields of pattern evaluation and electron beam technology. With a total of 2 patents, his work showcases innovative solutions that enhance the efficiency and accuracy of various processes.
Latest Patents
Chikara Itoh's latest patents include a pattern evaluation apparatus and a method of pattern evaluation. This invention provides a pattern evaluating device that includes light irradiating means for directing rays of light from a light source onto an object. It features an objective lens that allows light, having penetrated through the object, to pass through. An aperture member is included to stop the diameter of the light beam that has passed through the objective lens. A photo receiving element captures the light beam, and judging means evaluate the pattern based on the information received. Notably, the aperture member can change the numerical aperture depending on whether the sample has a pericle.
Another significant patent is the electron beam pattern transfer system, which incorporates an autofocusing mechanism. This system includes a photoelectric transducing mask within a vacuum container, designed to transfer a photoelectron beam pattern corresponding to the mask's pattern onto a sample. It utilizes a DC voltage generator to vary the voltage applied between the mask and the sample, along with a focusing coil of a superconductive magnet to create a magnetic field of predetermined intensity. The system is equipped with detectors to electrically detect any undesirable variations in mask-to-sample distance or magnetic field intensity. A microprocessor automatically calculates the necessary corrections in real-time, ensuring the photoelectron beam pattern remains focused on the sample.
Career Highlights
Chikara Itoh has worked with prominent companies such as Tokyo Shibaura Denki and Toshiba Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in technology.
Collaborations
Chikara has collaborated with notable coworkers, including Toru Tojo and Mitsuo Tabata. Their combined expertise has fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Chikara Itoh's contributions to pattern evaluation and electron beam technology highlight his innovative spirit and dedication to advancing these fields. His patents reflect a commitment to improving technological processes, making him a significant figure in the world