Chih Kiong Terence Gan

Title: Innovations of Chih Kiong Terence Gan

Introduction

Chih Kiong Terence Gan is a notable inventor based in Singapore, recognized for his contributions to the field of micromirror technology. With a total of 2 patents, he has made significant advancements in the design and functionality of optical devices.

Latest Patents

Gan's latest patents include a groundbreaking invention titled "Single-crystal-silicon 3D micromirror." This innovative device features a mirror plate connected to actuators via flexible springs, with the actuators anchored to the substrate. The use of single crystal silicon and aluminum as bi-morph materials, along with silicon dioxide for electrical isolation, enhances the device's performance. The microstructure's thickness variation is achieved through a two-step p-n junction in a p-type substrate. The design employs thick and thin n-silicon layer formation and DRIE cut mechanisms, ensuring that all components are released simultaneously to prevent damage to the delicate flexural springs. The working prototypes of this device are suitable for optical switching array architectures, allowing for deflections of up to 10 degrees.

Another patent, "Method of making a single-crystal-silicon 3D micromirror," outlines a detailed process for creating these micromirrors. This method involves forming first and second n-doped regions on a p-doped single crystal silicon substrate, followed by the patterning of an aluminum layer to create thermal actuators. A dielectric layer is then deposited, and a metal layer is patterned to form bond pads and reflecting surfaces. The substrate is etched from the backside, and the wafer is diced into mirror array chips. The process also includes etching portions of the first n-doped regions to create flexible springs that connect the micromirrors to the thermal actuators.

Career Highlights

Chih Kiong Terence Gan is currently employed at the Agency for Science, Technology and Research, where he continues to innovate and develop new technologies in the field of micromirrors.

Collaborations

Gan has collaborated with notable colleagues such as Ajay Agarwal and Janak Singh, contributing to the advancement of their shared research interests.

Conclusion

Chih Kiong Terence Gan's work in the field of micromirror technology showcases his innovative spirit and dedication to advancing optical devices. His patents reflect a commitment to enhancing