Chih-chiang Tu

Title: Chih-chiang Tu: Innovator in Extreme Ultraviolet Technology

Introduction

Chih-chiang Tu is a prominent inventor based in Taoyuan, Taiwan. He has made significant contributions to the field of extreme ultraviolet (EUV) technology, particularly in the development of radiation source apparatuses and lithography systems. His innovative work has implications for the semiconductor manufacturing industry.

Latest Patents

Chih-chiang Tu holds a patent for an "Extreme ultraviolet (EUV) radiation source apparatus, EUV lithography system, and method for generating extreme ultraviolet radiation." This patent describes an EUV radiation source apparatus that includes a source vessel with a chamber, a crucible, a tin layer, and a catcher designed to collect fuel debris from laser beam collisions. The method for generating EUV radiation involves collecting fuel debris, dissipating heat, and venting gas to cool the chamber.

Career Highlights

Chih-chiang Tu is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work at this company has allowed him to contribute to cutting-edge technologies that are essential for modern electronics.

Collaborations

Chih-chiang Tu has collaborated with notable colleagues, including Hsin-Fu Tseng and Chih-Wei Wen. These collaborations have fostered innovation and advancement in the field of semiconductor technology.

Conclusion

Chih-chiang Tu's contributions to extreme ultraviolet technology and his patent on EUV radiation source apparatuses highlight his role as a key innovator in the semiconductor industry. His work continues to influence advancements in lithography systems and semiconductor manufacturing processes.