Chien-Shen Wung

Title: Chien-Shen Wung: Innovator in Low Temperature Polysilicon Film Manufacturing

Introduction

Chien-Shen Wung is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the development of low temperature polysilicon films. With a total of 2 patents to his name, Wung's work has implications for various applications in electronics and materials science.

Latest Patents

Wung's latest patents focus on a method of manufacturing a low temperature polysilicon film. This innovative method involves forming a first metal layer on a substrate, creating openings in this layer, and then adding a second metal layer with corresponding holes. A silicon layer is subsequently formed on the second metal layer, with silicon seeds placed inside the holes. After the removal of the metal layers, an amorphous silicon layer is created using the silicon seeds. A laser crystallization step is then performed to convert the amorphous layer into a polysilicon layer. This process allows for precise control over the size and distribution of silicon grains, as well as the number of silicon crystal interfaces.

Career Highlights

Chien-Shen Wung is currently employed at AU Optronics Corporation, where he continues to advance his research and development efforts. His work has been instrumental in enhancing the efficiency and effectiveness of polysilicon film manufacturing processes.

Collaborations

Wung has collaborated with several talented individuals in his field, including Chih-Chin Chang and Mao-Yi Chang. These collaborations have fostered a productive environment for innovation and have contributed to the success of their projects.

Conclusion

Chien-Shen Wung's contributions to the field of low temperature polysilicon film manufacturing highlight his role as a key innovator in the semiconductor industry. His patents and ongoing work at AU Optronics Corporation continue to influence advancements in technology.