This inventor holds 1 USPTO granted patent and 6 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Innovations of Chia-Jen Chen in Extreme Ultraviolet Lithography
Introduction
Chia-Jen Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of lithography, particularly in the development of technologies that enhance the precision of semiconductor manufacturing. His innovative work has led to the filing of a patent that addresses critical challenges in extreme ultraviolet (EUV) lithography.
Latest Patents
Chia-Jen Chen holds a patent for an "Interstitial type absorber for extreme ultraviolet mask." This invention provides a method for lithographically patterning a photoresist. The method involves receiving a wafer with the photoresist and exposing it using EUV radiation reflected by an EUV mask. The mask consists of a substrate, a reflective multilayer stack, a capping layer, and a patterned absorber layer. The patterned absorber layer includes a matrix metal and an interstitial element, with a size ratio of the interstitial element to the matrix metal ranging from about 0.41 to about 0.59. This innovation is crucial for improving the accuracy and efficiency of semiconductor fabrication processes.
Career Highlights
Chia-Jen Chen is currently employed at Taiwan Semiconductor Manufacturing Co., Ltd., a leading company in the semiconductor industry. His work at TSMC has positioned him at the forefront of technological advancements in chip manufacturing. With a focus on EUV lithography, he continues to contribute to the evolution of semiconductor technologies.
Collaborations
Chia-Jen Chen collaborates with Yi-Jhih Lin, a talented woman in the field. Together, they work on projects that push the boundaries of current lithography techniques and explore new possibilities in semiconductor manufacturing.
Conclusion
Chia-Jen Chen's innovative contributions to extreme ultraviolet lithography exemplify the importance of advancements in semiconductor technology. His patent and ongoing work at Taiwan Semiconductor Manufacturing Co., Ltd. highlight his role as a key inventor in this critical field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile