Company Filing History:
Years Active: 2017-2020
Title: Chi Wei Lo: Innovator in Substrate Surface Preparation
Introduction
Chi Wei Lo is a notable inventor based in San Jose, CA, with a focus on methods for enhancing substrate surface preparation. He holds a total of 3 patents, showcasing his contributions to the field of semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Method and apparatus for precleaning a substrate surface prior to epitaxial growth." This invention relates to methods for removing contaminants and native oxides from substrate surfaces. The process involves using a plasma method to eliminate contaminants on the substrate surface, followed by a remote plasma-assisted dry etch process for cleaning.
Career Highlights
Chi Wei Lo is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work has significantly impacted the efficiency and effectiveness of substrate preparation techniques.
Collaborations
He has collaborated with notable coworkers, including Christopher Sean Olsen and Theresa Kramer Guarini, contributing to advancements in their shared field of expertise.
Conclusion
Chi Wei Lo's innovative approaches to substrate surface preparation have made a significant mark in the semiconductor industry. His patents reflect a commitment to improving manufacturing processes and enhancing product quality.